System and Method for Reducing Radiation-Induced False Counts in an Inspection System

ABSTRACT

An inspection system with radiation-induced false count mitigation includes a radiation count controller coupled to one or more radiation sensors positioned proximate to an illumination sensor oriented to detect illumination from a sample. The radiation count controller may identify a set of radiation detection events based on radiation signals received from the radiation sensors during operation of the illumination sensor. The inspection system may further include an inspection controller to identify a set of illumination detection events based on an illumination signal, identify one or more features on the sample based on the set of illumination detection events, receive the set of radiation detection events from the radiation count controller, compare the set of radiation detection events to the set of illumination detection events to identify a set of coincidence events, and refine the one or more identified features on the sample based on the set of coincidence events.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application claims the benefit of and is a continuationapplication of U.S. Non-Provisional patent application Ser. No.14/946,563, filed on Nov. 19, 2015, entitled SYSTEM AND METHOD FORREDUCING RADIATION-INDUCED FALSE COUNTS IN AN INSPECTION SYSTEM, namingXiman Jiang, Anatoly Romanovsky, Christian Wolters, Stephen Biellak, andMous Tatarkhanov as inventors, which claims the benefit of U.S.Provisional Patent Application No. 62/161,454, filed on May 14, 2015,entitled RADIATION-INDUCED FALSE COUNT REDUCTION IN INSPECTION SYSTEMS,naming Ximan Jiang, Anatoly Romanovsky, Christian Wolters, and StephenBiellak. Application Ser. Nos. 14/946,563, and 62/161,454 areincorporated herein by reference in the entirety.

TECHNICAL FIELD

The present disclosure relates generally to the field of noise reductionin inspection systems, and, in particular, to the reduction of noiseassociated with particle radiation in wafer inspection systems.

BACKGROUND

False positives, or false counts, are undesirable in any inspectionsituation. False counts in an inspection system can arise from multiplesources. This may include electronic noise associated with detectors inthe system as well as external noise associated with photons orradiative particles from sources other than the sample of interest. Inthe context of inspection systems, a false count occurs when a signalnot associated with a sample is detected by one or more detectors and isincorrectly associated with properties of the sample. Radiation sourcesthat may affect the false count rate of an inspection system mayinclude, but are not limited to, the decay of trace levels ofradioactive isotopes near the inspection system as well as high energycosmic radiation by-products generated in the atmosphere. Theseradiation sources may produce radiative particles and/or photonsincluding, but not limited to, alpha particles, beta particles,neutrons, muons, and gamma rays. For example, muons are primarilygenerated as a by-product of the interaction of cosmic radiation withthe atmosphere. Radiative particles can also be generated throughinelastic scattering from materials in close proximity to the inspectionsystem.

Advances in the application of multi-pixel detectors in inspectionsystems have resulted in increased conversion gain and lower noisereadout electronics. However, these advances have also resulted inincreased sensitivity to the detection of particle radiation, such asmuons, gamma particles, and alpha particles, to name a few. Therefore,it is desirable to provide a method and system that cures the defectsidentified above in previous approaches.

SUMMARY

An inspection system with radiation-induced false count mitigation isdisclosed, in accordance with one or more illustrative embodiments ofthe present disclosure. In one illustrative embodiment, the systemincludes a radiation count controller coupled to one or more radiationsensors for the detection of particle radiation in which at least oneradiation sensor is positioned proximate to an illumination sensororiented to detect illumination from a sample. In another illustrativeembodiment, the radiation count controller identifies a set of radiationdetection events based on radiation signals received from the one ormore radiation sensors during operation of the illumination sensor. Inanother illustrative embodiment, the system includes an inspectioncontroller coupled to the illumination sensor and the radiation countcontroller. In another illustrative embodiment, the inspectioncontroller identifies a set of illumination detection events based on anillumination signal received from the illumination sensor. In anotherillustrative embodiment, the inspection controller identifies one ormore features on the sample based on the set of illumination detectionevents. In another illustrative embodiment, the inspection controllerreceives the set of radiation detection events from the radiation countcontroller. In another illustrative embodiment, the inspectioncontroller compares the set of radiation detection events to the set ofillumination detection events to identify a set of coincidence events inwhich the set of coincidence events corresponds to simultaneousoccurrences of radiation detection events and illumination detectionevents. In another illustrative embodiment, the inspection controllerrefines the one or more identified features on the sample based on theset of coincidence events.

An inspection system with radiation-induced false count mitigation isdisclosed, in accordance with one or more illustrative embodiments ofthe present disclosure. In one illustrative embodiment, the systemincludes one or more detector assemblies. In another illustrativeembodiment, a detector assembly includes an illumination sensorconfigured to detect illumination from a sample. In another illustrativeembodiment, the detector assembly includes one or more radiation sensorsconfigured to detect particle radiation. In another illustrativeembodiment, the system includes a radiation count controller coupled tothe one or more radiation sensors of the one or more detectorassemblies. In another illustrative embodiment, the radiation countcontroller identifies a set of radiation detection events based onradiation signals received from the one or more radiation sensors of theone or more detector assemblies during operation of the illuminationsensors of the one or more detector assemblies. In another illustrativeembodiment, the system includes an inspection controller coupled to theillumination sensors of the one or more detector assemblies and theradiation count controller. In another illustrative embodiment, theillumination controller identifies a set of illumination detectionevents based on an illumination signal received from the illuminationsensors of the one or more detector assemblies. In another illustrativeembodiment, the illumination controller identifies one or more featureson the sample based on the set of illumination detection events. Inanother illustrative embodiment, the illumination controller receivesthe set of radiation detection events from the radiation countcontroller. In another illustrative embodiment, the illuminationcontroller compares the set of radiation detection events to the set ofillumination detection events to identify a set of coincidence events inwhich the set of coincidence events corresponds to simultaneousoccurrences of radiation detection events and illumination detectionevents. In another illustrative embodiment, the illumination controllerrefines the one or more identified features on the sample based on theset of coincidence events.

A method for reducing radiation-induced false counts on a detector in aninspection system is disclosed, in accordance with one or moreillustrative embodiments of the present disclosure. In one illustrativeembodiment, the method includes illuminating at least a portion of asample with a beam of illumination. In another illustrative embodiment,the method includes generating, with an illumination sensor, a set ofillumination detection events based on the illumination signal receivedfrom an illumination. In another illustrative embodiment, the methodincludes identifying, with one or more processors, a set of illuminationdetection events based on an illumination signal received from theillumination sensor. In another illustrative embodiment, the methodincludes identifying, with one or more processors, one or more featureson the sample based on the set of illumination detection events. Inanother illustrative embodiment, the method includes generating, withone or more radiation sensors, a set of radiation detection eventsduring operation of the illumination sensor. In another illustrativeembodiment, the method includes comparing, with one or more processors,the set of radiation detection events to the set of illuminationdetection events to identify a set of coincidence events in which theset of coincidence events corresponds to simultaneous occurrences ofradiation detection events and illumination detection events. In anotherillustrative embodiment, the method includes refining, with one or moreprocessors, the one or more identified features on the sample based onthe set of coincidence events.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary and explanatory onlyand are not necessarily restrictive of the invention as claimed. Theaccompanying drawings, which are incorporated in and constitute a partof the specification, illustrate embodiments of the invention andtogether with the general description, serve to explain the principlesof the invention.

BRIEF DESCRIPTION OF DRAWINGS

The numerous advantages of the disclosure may be better understood bythose skilled in the art by reference to the accompanying figures inwhich:

FIG. 1 is a schematic diagram illustrating an inspection system withradiation-induced false count mitigation, in accordance with one or moreembodiments of the present disclosure.

FIG. 2A is a schematic diagram illustrating beams of radiation incidenton an illumination sensor and a radiation sensor, in accordance with oneor more embodiments of the present disclosure.

FIG. 2B is a schematic diagram illustrating the positioning of radiationshields to block radiation from solid angles not associated with imagingillumination from a sample, in accordance with one or more embodimentsof the present disclosure.

FIG. 3A is a schematic diagram illustrating the positioning of a singleradiation sensor proximate to a vertical illumination sensor, inaccordance with one or more embodiments of the present disclosure.

FIG. 3B is a schematic diagram illustrating the positioning of a tworadiation sensors proximate to a vertical illumination sensor in orderto capture all beam radiation paths passing through the illuminationsensor, in accordance with one or more embodiments of the presentdisclosure.

FIG. 3C is a schematic diagram illustrating the positioning of a singlecurved radiation sensor proximate to a vertical illumination sensor inorder to capture all beam radiation paths passing through theillumination sensor, in accordance with one or more embodiments of thepresent disclosure.

FIG. 3D is a schematic diagram illustrating the positioning of a singleradiation sensor proximate to a horizontal illumination sensor, inaccordance with one or more embodiments of the present disclosure.

FIG. 4 is a simple flow diagram illustrating coupling between anillumination sensor, a radiation sensor, a sample inspection controller,a timing analysis controller, and a post-processing controller, inaccordance with one or more embodiments of the present disclosure.

FIG. 5 is a flow diagram depicting a method for reducingradiation-induced false counts on a detector in an inspection system, inaccordance with one or more embodiments of the present disclosure.

DETAILED DESCRIPTION

Reference will now be made in detail to the subject matter disclosed,which is illustrated in the accompanying drawings. The presentdisclosure has been particularly shown and described with respect tocertain embodiments and specific features thereof. The embodiments setforth herein are taken to be illustrative rather than limiting. Itshould be readily apparent to those of ordinary skill in the art thatvarious changes and modifications in form and detail may be made withoutdeparting from the spirit and scope of the disclosure.

Referring generally to FIGS. 1 through 5, a system and method forreducing false counts in an inspection system are described inaccordance with one or more embodiments of the disclosure. Embodimentsof the present disclosure are directed to an inspection system withfalse count mitigation capabilities that reduce false counts generatedby high energy particles (e.g., muons). Additional embodiments aredirected to wafer inspection systems with false count mitigationcapabilities that reduce false counts generated by additional radiationsources (e.g., alpha particles, beta particles, neutrons, muons, andgamma rays). For the purposes of the present disclosure, the terms “beamof radiation” and “radiation beam” are defined as radiative energy inthe form of radiative particles and/or photons propagating along adefined path. Further, for the purposes of the present disclosure, theterm “particle radiation” is defined to include radiation associatedwith sources other than the sample and includes, but is not limited toalpha particles, beta particles, neutrons, muons, or gamma rays.

It is recognized herein that in the context of inspection systems, falsecounts may be generated by the detection of background radiation notassociated with the sample of interest. It is further recognized thatmany semiconductor-based detectors configured for the detection ofelectromagnetic illumination such as ultraviolet (UV) or visiblewavelengths are also sensitive to background radiation and that thedegree of sensitivity is related to multiple factors including, but notlimited to, the radiation flux, the detector design, and the operationalconditions of the detector. By way of a non-limiting example, thesensitivity of a Charge Coupled Device (CCD) to radiation sources is inpart a function of the charge-to-voltage conversion gain of the device,which describes the voltage induced by the generation of an electron inresponse to a detected event. In this way, increasing the conversiongain of a CCD increases the sensitivity of the device to anyillumination detection event, which may include both the desired signalas well as background noise signals (e.g., radiation detection events).

In some applications, it is desirable to operate detectors at highsensitivity levels in order to maximize the resolution and sensitivityof the wafer inspection system to the illumination signal. By way ofnon-limiting example, detectors in unpatterned wafer inspection systemsmay be operated at high sensitivity levels in order to detect subtledifferences between illumination signals associated with defect regionsand non-defect regions. However, operating the detectors at highsensitivity correspondingly increases the impact of noise from radiativesources not associated with the sample that leads to false counts.

FIGS. 1A and 1B illustrate an inspection system 100 withradiation-induced false count mitigation capabilities, in accordancewith one or more embodiments of the present disclosure. In oneembodiment, the system 100 includes an illumination source 101configured to generate a beam of illumination 102. The illuminationsource 101 is configured to generate a beam of illumination 102including a selected wavelength or a wavelength range such as, but notlimited to, ultraviolet (UV), extreme ultraviolet (EUV), deepultraviolet (DUV), vacuum ultraviolet light (VUV), visible, or infrared(IR) wavelengths of light. For example, the illumination source 101 mayinclude any source capable of emitting illumination in the range ofapproximately 100 nm to 450 nm. For example, the illumination source 101may include, but is not limited to, a narrow band source (e.g., lasersource) or a broadband source (e.g., a Laser Sustained Plasma (LSP)source, a discharge lamp, or the like). By way of non-limiting example,the illumination source 101 may be a UV laser (e.g. an excimer laser orthe like) with an output wavelength of 266 nm.

In one embodiment, the system 100 includes an illumination pathway 103for directing at least a portion of the beam of illumination 102 to asample 106. The illumination pathway 103 may include any number and typeof optical elements suitable for delivering the beam of illumination 102from the output of the illumination source 101 to the surface of thesample 106. For example, the illumination pathway 103 may include, butis not limited to, one or more lenses 104, one or more beamsplitters112, one or more collimating elements (not shown), one or more filters(not shown), one or more polarizing elements (not shown) or one or moreobjective lenses 110 for directing, focusing, and otherwise processingillumination emitted by the illumination source 101.

In another embodiment, the system 100 includes a stage assembly 108suitable for securing and positioning a sample 106. The stage assembly108 may include any sample stage architecture known in the art. By wayof a non-limiting example, the stage assembly 108 may include a linearstage. By way of another example, the stage assembly 108 may include arotational stage. The sample 106 may include a wafer, such as, but notlimited to, an unpatterned semiconductor wafer.

In one embodiment, the system 100 includes an imaging pathway 113configured to direct illumination from the sample 106 to a detectorassembly 120. In one embodiment, the imaging pathway 113 includes anobjective lens 110. In another embodiment, the imaging pathway 113includes a multi-lens imaging system. By way of non-limiting example, amulti-lens imaging system may include an objective lens 110 configuredto collect imaging illumination 114 from the sample and one or morelenses 116 configured to generate an image of the sample on an detectorassembly 120. In this way, an objective lens 110 may simultaneouslyfocus a beam of illumination 102 onto the sample and collect imagingillumination 114 from the sample. In one embodiment, a beam splitter 112is positioned to overlap at least a portion of the illumination pathway103 and the imaging pathway 113. It is noted herein that the beamsplitter 112 is not intended to be limiting and need not be present inall embodiments of the present disclosure. In another embodiment, theillumination pathway 103 and the imaging pathway 113 are non-collinearand include independent optical elements.

In one embodiment, the detector assembly 120 includes one or moredetectors communicatively coupled to one or more controllers 126. In oneembodiment, a detector assembly 120 includes an illumination sensor 122suitable for detecting imaging illumination 114 scattered or reflectedfrom a sample 106. In another embodiment, the detector assembly 120further includes one or more radiation sensors 124 suitable fordetecting radiation (e.g., muons, alpha particles, beta particles,and/or gamma rays) from sources other than the sample 106. In this way,radiation detection events detected on the illumination sensor 122 maybe simultaneously detected by one or more radiation sensors 124 anddiscarded as noise.

FIGS. 2A and 2B illustrate a detector assembly 120 including anillumination sensor 122 and a proximate radiation sensor 124, inaccordance with one or more embodiments of the present disclosure. Inone embodiment, one or more radiation shields 118 are positioned aroundan illumination sensor 122 and are configured to absorb or redirectradiation (e.g. radiation beams 202 and 204) such that the radiationdoes not reach the sensor 122. The one or more radiation shields may beformed from any material known in the art suitable for preventingbackground radiation from reaching an illumination sensor 122. In oneembodiment, the radiation shields 118 are formed from one or more heavyelements. For example, the radiation shields 118 may be, but are notrequired to be, formed from at least one of lead, tungsten, antimony,tin, or bismuth. It is noted herein that the thickness of the one ormore radiation shields may be adjusted according to material propertiesto block radiation from reaching an illumination sensor 122. The one ormore the radiation shields 118 may be further configured as structuralor functional components in a detector assembly 120. For example, theone or more radiation shields 118 may be configured to stabilize orposition an illumination sensor 122. In another embodiment, the one ormore radiation shields 118 are integrated into a mounting package (e.g.a ceramic mounting package) attaching an illumination sensor 122 toadditional components of the system 100. In another embodiment, theradiation shields 118 are further configured to operate as a heat sinkfor the illumination sensor 122.

In one embodiment, one or more radiation shields 118 are positioned toblock radiation from all solid angles not associated with imagingillumination 114. Referring now to FIG. 2B, in one embodiment, one ormore imaging lenses 128 generate an image of the sample 106 on theillumination sensor 122. Imaging rays 114 a, 114 b, and 114 c representimaging illumination from the entire field of view of the imagingsystem; specifically rays 114 a and 114 c represent rays covering thesolid angle of the illumination sensor 122 associated with imagingillumination 114. In one embodiment, one or more radiation shields 118are positioned in a rotationally symmetric configuration around theillumination sensor 122. For example, a beam of radiation 202 is blockedby this configuration. In another embodiment, one or more radiationshields are positioned behind the illumination sensor 122 in order toblock beams of radiation (e.g. beam of radiation 204) incident from anend of the illumination sensor 122 opposite the sample 106.

It is noted herein that some sources of radiation may interact with theillumination sensor 122 despite the presence of radiation shields 118.By way of non-limiting example, beams of radiation with paths within thesolid angle associated with imaging illumination 114 may interact withthe illumination sensor 122. By way of a second non-limiting example,high energy radiation sources including, but not limited to, muons orgamma rays may propagate through one or more radiation shields 118 andmay interact with the illumination sensor 122. In one embodiment, one ormore radiation sensors 124 are positioned proximate to the illuminationsensor 122 to detect beams of radiation that interact with theillumination sensor 122 (e.g. beam of radiation 206).

It is noted herein that a radiation sensor 124 may include one or moreof any sensor type known in the art configured to detect particleradiation and may include, but is not limited to, a scintillationsensor, a semiconductor device, or a dosimeter. It is further noted thatan illumination sensor 122 may include one or more of any sensor typeknown in the art configured to detect illumination. By way ofnon-limiting example, an illumination sensor 122 may include multiplepixel sensors including, but not limited to CCD devices, complementarymetal-oxide semiconductor (CMOS) devices, and the like. By way of asecond non-limiting example, an illumination sensor 122 may includesingle pixel sensors including, but not limited to, photo-multipliertube (PMT) sensors, photodiodes, or avalanche photodiode (APD) sensors.

In one embodiment, a radiation sensor 124 is configured as ascintillation sensor including a scintillating material 124 a coupled toa photomultiplier tube (PMT) 124 b. In this way, the PMT 124 b detectsone or more photons emitted by the scintillating material 124 a inresponse to the detection of one or more radiation detection events. Inanother embodiment, the scintillating material 124 a is configured as awaveguide such that at least a portion of the photons emitted by thescintillating material 124 a are guided to the PMT 124 b through totalinternal reflection.

It is contemplated herein that the relative timing between anillumination detection event of an illumination sensor 122 and aradiation detection event of a proximate radiation sensor 124 may beused to determine the presence of a radiation-induced false count. Inone embodiment, one or more radiation sensors 124 are positionedproximate to an illumination sensor 122 and are further positioned suchthat illumination from the sample 106 is blocked. A beam of radiation206 that interacts with both an illumination sensor 122 and a proximateradiation sensor 124 may trigger an event on both sensors; sinceillumination from the sample does not reach the radiation sensor 124,such an event may be identified as a false count. Similarly, detectionevents on the illumination sensor 122 not associated with acorresponding radiation detection event on the one or more radiationsensors 124 may be identified as valid. Furthermore, a beam of radiation208 that interacts with the radiation sensor 124 but not theillumination sensor 122 may be disregarded. However, a beam of radiation208 may be incident on a radiation sensor 124 at the same time as anillumination event associated with illumination from the sample isincident on an illumination sensor 122. In this way, a valid signal willbe interpreted as invalid; such an event may be referred to as a falsecoincidence event. It is noted herein that the rate of false coincidenceevents may be, but is not limited to be, dependent on the size of theone or more radiation sensors 124 or the positions of one or moreradiation sensors 124 relative to an illumination sensor 122.

In one embodiment, one or more radiation sensors 124 are positionedrelative to an illumination sensor 122 to cover all solid angles throughwhich beams of radiation are incident on the illumination sensor 122. Inthis way, false counts associated with a beam of radiation incident onand detected by an illumination sensor 122 may be mitigated. It is notedherein that the relative size and position of one or more radiationsensors 124 proximate to an illumination sensor 122 will determine thedegree to which beams of radiation passing through an illuminationsensor 122 may be detected by the one or more radiation sensors 124. Ifthe solid angle is greater to or equal to 27 defining a hemisphere forall points on the illumination sensor 122, then beams of radiation fromany angle incident on the illumination sensor 122 may be detected by theone or more radiation sensors 124.

The solid angle of the one or more radiation sensors 124 measured from apoint on the illumination sensor 122 may be increased by increasing thesize of the active area of one or more radiation sensors 124 relative tothe active area of the illumination sensor 122. Additional methods toincrease the solid angle of the one or more radiation sensors 124measured from a point on the illumination sensor include, but are notlimited to, increasing the number of sensors and decreasing the distancebetween an illumination sensor 122 and one or more radiation sensors124.

It is further noted that the radiation flux of high energy radiationassociated with by-products of cosmic rays (e.g. muons) is not uniformand is maximum near the zenith. The incidence of high energy radiationassociated with by-products of cosmic rays may thus be minimized byminimizing the cross-sectional area of an illumination sensor 122 in theplane normal to the zenith. It is further noted that minimizing thepixel dimensions of the illumination sensor 122 may further reduce theincidence of such high energy radiation and thus the false count rate.However, the sensor pixel volume also influences device performancecharacteristics such as the resolution, mean transfer function,full-well potential, dynamic range, speed, and cost; therefore, theminimization of pixel volume to reduce the false count rate may bebalanced against these factors.

FIGS. 3A through 3D are simplified schematic diagrams illustrating fournon-limiting embodiments of the placement of one or more radiationsensors 124 relative to an illumination sensor 122. FIG. 3A illustratesthe placement of a single radiation sensor 124 with an active arealarger than the active area of the illumination sensor 122, inaccordance with one or more embodiments of the present disclosure. Theillumination sensor 122 is placed vertically to minimize the incidenceof high-energy radiation from the zenith. FIG. 3B illustrates theplacement of multiple radiation sensors 124 around the illuminationsensor 122, in accordance with one or more embodiments of the presentdisclosure. FIG. 3C illustrates a curved radiation sensor 124 placedproximate to the illumination sensor 122, in accordance with one or moreembodiments of the present disclosure. It is noted herein that theability of one or more radiation sensors 124 to capture beams ofradiation that pass through the illumination sensor 122 depends multiplefactors including, but not limited to, the size of the radiation sensor124 and the separation between radiation sensor 124 and the illuminationsensor 122. For example, a beam of radiation described by path 302passing through the illumination sensor 122 is captured by one or moreradiation sensors 124 in the embodiments illustrated in FIGS. 3B and 3C,but not by the embodiment illustrated in FIG. 3A. It is noted that oneor more radiation sensors 124 may be placed at any angle relative to thezenith. FIG. 3D is a simplified schematic diagram illustrating ahorizontally-oriented illumination sensor 122 and a proximatehorizontally-oriented radiation sensor 124 oriented, in accordance withone or more embodiments of the present disclosure.

In one embodiment, the system 100 includes a controller 126communicatively coupled to an illumination sensor 122 and a proximateradiation sensor 124. In one embodiment, the controller 126 includes oneor more processors 125. In another embodiment, the one or moreprocessors 125 are configured to execute a set of program instructionsmaintained in a memory medium 127, or memory.

The one or more processors 125 of a controller 126 may include anyprocessing element known in the art. In this sense, the one or moreprocessors 125 may include any microprocessor-type device configured toexecute algorithms and/or instructions. In one embodiment, the one ormore processors 125 may consist of a desktop computer, mainframecomputer system, workstation, image computer, parallel processor, or anyother computer system (e.g., networked computer) configured to execute aprogram configured to operate the system 100, as described throughoutthe present disclosure. It is further recognized that the term“processor” may be broadly defined to encompass any device having one ormore processing elements, which execute program instructions from anon-transitory memory medium 127. Therefore, the above descriptionshould not be interpreted as a limitation on the present invention butmerely an illustration.

The memory medium 127 may include any storage medium known in the artsuitable for storing program instructions executable by the associatedone or more processors 125. By way of a non-limiting example, the memorymedium 127 may include a non-transitory memory medium. By way ofadditional non-limiting examples, the memory medium 127 may include, butis not limited to, a read-only memory, a random access memory, amagnetic or optical memory device (e.g., disk), a magnetic tape, a solidstate drive and the like. It is further noted that memory 127 may behoused in a common controller housing with the one or more processors125. In an alternative embodiment, the memory 127 may be locatedremotely with respect to the physical location of the one or moreprocessors 125 of controller 126. For instance, the one or moreprocessors 125 of controller 126 may access a remote memory (e.g.,server), accessible through a network (e.g., internet, intranet and thelike).

In one embodiment, an illumination source 101 is configured toilluminate at least a portion of a sample 106 with a beam ofillumination 102. In another embodiment, an illumination sensor 122 andone or more radiation sensors 124 are communicatively coupled to one ormore controllers 126 such that the one or more controllers 126 areconfigured to receive an illumination signal from the illuminationsensor 122 and a radiation signal from the one or more radiation sensors124. In another embodiment, the one or more controllers 126 areconfigured to identify a set of illumination detection events based onthe illumination signal. In another embodiment, the one or morecontrollers are configured to identify a set of radiation detectionevents based on the one or more radiation signals. In anotherembodiment, the one or more controllers 126 are configured to generate aset of coincidence events based on a comparison of the set ofillumination detection events to the set of radiation detection eventssuch that the set of coincidence events comprises simultaneousillumination detection events and radiation detection events. In anotherembodiment, one or more controllers 126 are configured to exclude theset of coincidence events from the set of illumination detection eventsin order to generate a set of identified features on the sample. It isnoted herein that the set of identified features on the sample mayinclude, but is not limited to, defect sites on the sample. In anotherembodiment, the memory 127 is configured to store the output of one ormore of the various steps described herein.

The determination of the set of illumination detection events and/or theset of radiation detection events may be performed using any methodknown in the art including, but not limited to, a thresholdingtechnique. By way of non-limiting example, the set of radiationdetection events may be formed based on a thresholding technique inwhich a radiation detection event occurs upon the detection of radiationabove a certain predetermined value. It is noted herein that thethreshold of the radiation sensor 124 may be adjusted to optimize theratio of false coincidence events to the false count rejection events,either of which may, but are not limited to, depend on sample type,sample quality, or the local radiation environment.

It is recognized herein that the steps described throughout the presentdisclosure may be carried out by a single controller 126 or,alternatively, multiple controllers 126. It is further noted herein thatthe one or more controllers 126 may be housed in a common housing orwithin multiple housings. In this way, any controller or combination ofcontrollers may be separately packaged as a module suitable forintegration into a complete inspection system 100. By way of anon-limiting example, a first controller may be configured to performthe step of identifying a set of illumination detection events based onan illumination signal received from the illumination sensor. One ormore additional controllers may then be configured to perform the stepsof: identifying a set of radiation detection events based on one or moreradiation signals received from the one or more radiation sensors,comparing the set of radiation detection events to the set ofillumination detection events to generate a set of coincidence events,and excluding the set of coincidence events from the set of illuminationdetection events to generate a set of identified features on the sample.

By way of a second non-limiting example, a first controller may beconfigured to perform the step of identifying a set of radiationdetection events based on one or more radiation signals received fromthe one or more radiation sensors. One or more additional controllersmay be configured to perform the steps of identifying a set ofillumination detection events, comparing the set of radiation detectionevents to the set of illumination detection events to generate a set ofcoincidence events, and excluding the set of coincidence events from theset of illumination detection events to generate a set of identifiedfeatures on the sample. In one embodiment, a first controller isconfigured to perform the step of identifying a set of radiationdetection events based on one or more radiation signals received fromthe one or more radiation sensors. A second controller including one ormore field programmable gate arrays (FPGAs) attached to an illuminationsensor 122 is configured to perform the steps of identifying a set ofillumination detection events, comparing the set of radiation detectionevents to the set of illumination detection events to generate a set ofcoincidence events, and excluding the set of coincidence events from theset of illumination detection events to generate a set of identifiedfeatures on the sample. It is noted herein that one or more controllersincluding one or more FPGAs may be integrated into electronicsassociated with an illumination sensor 122 to perform pre-processing ofan illumination signal. In this way, a set of radiation detection eventsmay be an input into a pre-processing algorithm such that the output ofthe pre-processing algorithm is a set of identified features on thesample including corrections for radiation-induced false counts.

It is noted herein that timestamps may be associated with illuminationdetection events measured by an illumination sensor 122 and/or withradiation detection events measured by one or more radiation sensors 124for the purpose of identifying false counts in an illumination sensor122 generated by background radiation. In one embodiment, anillumination source 101 is configured to illuminate at least a portionof a sample 106 with a beam of illumination 102. In another embodiment,a controller 126 is communicatively coupled to a detector assembly 120including an illumination sensor 122 and one or more radiation sensors124. In another embodiment, a controller 126 is configured to identify aset of radiation detection events based on one or more radiation signalsfrom one or more radiation sensors 124 and is further configured togenerate a set of radiation timestamps associated with the set ofradiation detection events. In another embodiment, a controller 126 isconfigured to identify a set of illumination detection events based onthe illumination signal received from the illumination sensor 122 and isfurther configured to generate a set of illumination detection eventtimestamps associated with the set of imaging events. In anotherembodiment, a controller 126 is configured to compare the set ofillumination detection event timestamps with the set of radiationdetection event timestamps to generate a set of coincidence events basedon the detection and radiation timestamps. In another embodiment, acontroller 126 is configured to exclude the set of coincidencetimestamps to generate a set of identified features on the sample 106that are associated with identified defect sites on the sample 106.

It is noted herein that an illumination detection event by anillumination sensor 122 may be considered a false count if a proximateradiation sensor 124 detects a simultaneous radiation detection event.However, there will be a non-zero time difference between anillumination detection event by an illumination sensor 122 and aradiation detection event by a radiation sensor 124, which is related tothe propagation time of the beam of radiation between the two sensors.Additionally, factors including, but not limited to, the clock speed ofa controller 126, the readout speed of the illumination sensor 122, orthe readout speed of a radiation sensor 124 may further limit theability to detect the precise time difference between detection events.An illumination detection event by an illumination sensor 122 and aradiation detection event by a radiation sensor 124 may be, but is notlimited to be considered simultaneous if the time difference between thetwo events is indistinguishable by the system 100. It is noted hereinthat the requirements for simultaneous detection are not intended to belimiting. For example, the time resolution associated with the detectionof simultaneous events may be adjusted in order to adjust thesensitivity of the system 100. By way of a non-limiting example, a timeresolution of tens of microseconds associated with the detection ofsimultaneous events may be sufficient to provide an acceptable falsecount mitigation rate.

It is noted herein that the mitigation of radiation-induced false countsneed not occur in real time by a system 100. FIG. 4 is a simple flowdiagram illustrating coupling between an illumination sensor, aradiation sensor, a sample inspection controller, a timing analysiscontroller, and a post-processing controller, in accordance with one ormore embodiments of the present disclosure. In one embodiment, anillumination sensor 122 is configured to detect illumination from asample 106 and is further configured to transmit an illumination signalto a sample inspection controller 402 configured to inspect a sample106. The sample inspection controller 402 may be configured to performany type of sample inspection known in the art including, but notlimited to, imaging or defect detection. In another embodiment, a timinganalysis controller 404 is communicatively coupled to the illuminationsensor 122 and one or more radiation sensors 124. In another embodiment,the timing analysis controller 404 is configured to receive one or moreradiation signals from the one or more radiation sensors 124. In anotherembodiment, the timing analysis controller 404 is further configured toidentify radiation detection events associated with the detection ofradiation not associated with the sample 106 and to transmit timinginformation associated with the radiation detection events topost-processing controller 406. In another embodiment, the timinganalysis controller 404 is further configured to receive asynchronization signal from the illumination sensor 122 in order tocorrelate radiation detection events with input from the illuminationsensor. The synchronization signal may include, but is not limited to,illumination acquisition start and stop times. In one embodiment, apost-processing controller 406 correlates timing information associatedwith radiation detection events to outputs of the sample inspectioncontroller 402 in order to remove false counts associated withradiation-induced events detected by the illumination sensor 122. Inanother embodiment, the timing controller 404 provides a list ofradiation detection events to the post-processing controller 406 forbinning. It is noted herein that the steps performed by controllers 402,404, and 406 may be alternatively be carried out by a single controller126 or by any combination of controllers. It is further noted that anycontroller or combination of controllers may be housed in a commonhousing or within multiple housings. In this way, the time-basedradiation-induced false count mitigation sub-system may be modularizedand packaged and integrated into an existing inspection system platform.Therefore, the above description should be interpreted as illustrativerather than limiting.

It is noted herein that the utilization of separate controllersassociated with sample inspection controller 402, timing analysiscontroller 404 and post-processing controller 406 enables themodularization of the time-based radiation-induced false countmitigation system, which may facilitate integration with the hardwareand/or software associated with existing wafer inspection systems. Inthis way, any inspection system known in the art may be improved by theaddition of a radiation-induced false count mitigation system. It isfurther noted herein that additional reduction of radiation-inducedfalse counts in an inspection system may be achieved by theincorporation of one or more radiation shields 118 by orienting theillumination sensor 122 vertically, and by reducing the pixel volume ofthe illumination sensor 122 as previously described herein.

It is noted herein that detector assemblies (e.g. 120) may experiencefalse counts even with a radiation-induced false count mitigationsystem. In one embodiment, two or more detector assemblies 120communicatively coupled to a controller 126 are used to further reduceradiation-induced false counts in an inspection system. In oneembodiment, each detector assembly includes an illumination sensor 122.In another embodiment, each detector assembly includes one or moreradiation sensors 124 proximate to an illumination sensor 122. A falsecount associated with one detector assembly is highly unlikely to occurin a second detector assembly. By utilizing multiple detectorassemblies, the total number of false counts in a system 100 may befurther reduced. In one embodiment, multiple detector assemblies areoriented to detect illumination scattered and/or reflected at multiplesolid angles. It is noted herein that a metric or filter may bedeveloped to capture known defect types while rejecting the number offalse coincidence events based on expected illumination patterns at themultiple solid angles detected by the one or more detector assemblies120.

FIG. 5 illustrates a flow diagram illustrating a method for reducingradiation-induced false counts on a detector in an inspection system inaccordance with one embodiment of the present disclosure. In oneembodiment, the method includes the step 502 of illuminating at least aportion of a sample with a beam of illumination. In another embodiment,the method includes the step 504 of identifying a set of imaging eventsbased on the illumination signal received from an illumination sensor.In another embodiment, the method includes the step 506 of generating aset of imaging event timestamps associated with the set of imagingevents. In another embodiment, the method includes the step 508 ofidentifying a set of radiation detection events based on one or moreradiation signals received from one or more radiation sensors. Inanother embodiment, the method includes the step 510 of generating a setof radiation detection event timestamps associated with the set ofradiation detection events. In another embodiment, the method includesthe step 512 of comparing the set of imaging event timestamps to the setof radiation detection event timestamps to generate a set of coincidenceevents. In this way, the set of coincidence events comprisesillumination detection events and radiation detection events withmatching timestamps. In another embodiment, the method includes the step514 of excluding the set of coincidence events from the set of imagingevents to generate a set of identified defect sites on the sample.

It is noted that the set of elements of system 100 as described aboveand illustrated in FIGS. 1 through 5 are provided merely forillustration and should not be interpreted as limiting. It isanticipated that a number of equivalent or additional configurations maybe utilized within the scope of the present invention. By way ofnon-limiting example, additional elements including, but not limited tobeam blocks or radiation shields 118 may be included in the system 100in order to prevent unwanted signals that may generate false positivesfrom reaching either the illumination sensor 122 or the one or moreradiation sensors 124. For example, one or more radiation shields 118with sufficient thermal and/or electrical properties may be directlybonded to a sensor package (e.g. a ceramic sensor package) to minimizespace requirements and/or cost.

All of the methods described herein may include storing results of oneor more steps of the method embodiments in a storage medium. The resultsmay include any of the results described herein and may be stored in anymanner known in the art. The storage medium may include any storagemedium described herein or any other suitable storage medium known inthe art. After the results have been stored, the results can be accessedin the storage medium and used by any of the method or systemembodiments described herein, formatted for display to a user, used byanother software module, method, or system, etc. Furthermore, theresults may be stored “permanently,” “semi-permanently,” temporarily, orfor some period of time. For example, the storage medium may be randomaccess memory (RAM), and the results may not necessarily persistindefinitely in the storage medium.

It is believed that the present disclosure and many of its attendantadvantages will be understood by the foregoing description, and it willbe apparent that various changes may be made in the form, constructionand arrangement of the components without departing from the disclosedsubject matter or without sacrificing all of its material advantages.The form described is merely explanatory, and it is the intention of thefollowing claims to encompass and include such changes. Furthermore, itis to be understood that the disclosure is defined by the appendedclaims.

What is claimed is:
 1. An inspection system with radiation-induced falsecount mitigation, comprising: a radiation count controllercommunicatively coupled to one or more radiation sensors configured todetect particle radiation, wherein at least one radiation sensor of theone or more radiation sensors is positioned proximate to an illuminationsensor oriented to detect illumination from a sample, wherein theradiation count controller includes one or more processors configured toexecute instructions causing the one or more processors to identify aset of radiation detection events based on radiation signals receivedfrom the one or more radiation sensors during operation of theillumination sensor; and an inspection controller communicativelycoupled to the illumination sensor and the radiation count controller,the inspection controller including one or more processors configured toexecute instructions causing the one or more processors to: identify aset of illumination detection events based on an illumination signalreceived from the illumination sensor; identify one or more features onthe sample based on the set of illumination detection events; receivethe set of radiation detection events from the radiation countcontroller; compare the set of radiation detection events to the set ofillumination detection events to identify a set of coincidence events,wherein the set of coincidence events corresponds to simultaneousoccurrences of radiation detection events and illumination detectionevents; and refine the one or more identified features on the samplebased on the set of coincidence events.
 2. The system of claim 1,wherein the one or more processors of the radiation count controller aredifferent than the one or more processors of the inspection controller.3. The system of claim 1, wherein the radiation count controllerincludes a microprocessor.
 4. The system of claim 1, wherein theinspection controller is further communicatively coupled to one or moreadditional illumination sensors, the one or more additional illuminationsensors each configured to detect illumination from the sample on afirst side of each of the one or more additional illumination sensors,wherein the radiation count controller is further communicativelycoupled to one or more additional radiation sensors, wherein at leastone radiation sensors of the one or more radiation sensors is positionedon a second side of each of the one or more additional illuminationsensors.
 5. The system of claim 4, wherein the one or more processors ofthe radiation count controller are further configured to executeinstructions causing the one or more processors to identify anadditional set of radiation detection events based on radiation signalsreceived from the one or more additional radiation sensors duringoperation of the one or more additional illumination sensors, whereinthe one or more processors of the inspection controller are furtherconfigured to execute instructions causing the one or more processorsto: generate one or more additional sets of identified features on thesample based on one or more signals received from the one or moreadditional illumination sensors, and compare the set of identifiedfeatures on the sample to the one or more additional sets of identifiedfeatures on the sample to generate a modified set of identified featureson the sample, wherein the modified set of identified features on thesample corresponds to features identified by at least two illuminationsensors; receive the additional set of radiation detection events fromthe radiation count controller; compare the additional set of radiationdetection events to the modified set of illumination detection events toidentify an additional set of coincidence events, wherein the additionalset of coincidence events corresponds to simultaneous occurrences ofradiation detection events and illumination detection events; and refinethe modified set of identified features on the sample based on theadditional set of coincidence events.
 6. The system of claim 1, whereinthe illumination sensor includes one or more radiation shieldspositioned around one or more surfaces of the illumination sensor toblock radiation from reaching the illumination sensor, wherein the oneor more radiation shields are open on the first side of the illuminationsensor to allow illumination from the sample to pass to the illuminationsensor.
 7. The system of claim 6, wherein the one or more radiationshields are formed from at least one of tungsten or lead.
 8. The systemof claim 6, wherein at least a portion the one or more radiation shieldsis further configured as a heat sink.
 9. The system of claim 1, whereinthe one or more illumination sensors comprise: at least one of one ormore single-pixel sensors or one or more multi-pixel sensors.
 10. Thesystem of claim 9, wherein the one or more single-pixel sensorscomprise: at least one of one or more photomultiplier tubes (PMTs), oneor more photodiodes, or one or more avalanche photodiode (APD) devices.11. The system of claim 9, wherein the one or more multi-pixel sensorscomprise: at least one of one or more charge-coupled devices (CCDs), orone or more complementary metal-oxide semiconductor (CMOS) devices. 12.The system of claim 1, wherein the one or more first radiation sensorsof a first detector are configured to have a larger active area than anactive area of the illumination sensor of the first detector.
 13. Thesystem of claim 1, wherein the illumination sensors is positionedvertically.
 14. The system of claim 1, wherein the one or more radiationsensors are configured to detect at least one of muons, alpha particles,beta particles, or gamma radiation.
 15. The system of claim 1, whereinthe one or more radiation sensors include one or more scintillationsensors.
 16. The system of claim 1, wherein the set of identifiedfeatures on the sample includes one or more defect sites.
 17. Aninspection system with radiation-induced false count mitigation,comprising: one or more detector assemblies comprising: an illuminationsensor configured to detect illumination from a sample; and one or moreradiation sensors configured to detect particle radiation; a radiationcount controller communicatively coupled to the one or more radiationsensors of the one or more detector assemblies, the radiation countcontroller including one or more processors configured to executeinstructions causing the one or more processors to identify a set ofradiation detection events based on radiation signals received from theone or more radiation sensors of the one or more detector assembliesduring operation of the illumination sensors of the one or more detectorassemblies; and an inspection controller communicatively coupled to theillumination sensors of the one or more detector assemblies and theradiation count controller, the inspection controller including one ormore processors configured to execute instructions causing the one ormore processors to: identify a set of illumination detection eventsbased on an illumination signal received from the illumination sensorsof the one or more detector assemblies; identify one or more features onthe sample based on the set of illumination detection events; receivethe set of radiation detection events from the radiation countcontroller; compare the set of radiation detection events to the set ofillumination detection events to identify a set of coincidence events,wherein the set of coincidence events corresponds to simultaneousoccurrences of radiation detection events and illumination detectionevents; and refine the one or more identified features on the samplebased on the set of coincidence events.
 18. The system of claim 17,wherein the one or more processors of the radiation count are differentthan the one or more processors of the inspection controller.
 19. Thesystem of claim 17, wherein the illumination sensors of the one or moredetector assemblies are positioned vertically.
 20. A method for reducingradiation-induced false counts on a detector in an inspection system,comprising illuminating at least a portion of a sample with a beam ofillumination; generating, with an illumination sensor, a set ofillumination detection events based on the illumination signal receivedfrom an illumination; identifying, with one or more processors, a set ofillumination detection events based on an illumination signal receivedfrom the illumination sensor; identifying, with one or more processors,one or more features on the sample based on the set of illuminationdetection events; generating, with one or more radiation sensors, a setof radiation detection events during operation of the illuminationsensor; comparing, with one or more processors, the set of radiationdetection events to the set of illumination detection events to identifya set of coincidence events, wherein the set of coincidence eventscorresponds to simultaneous occurrences of radiation detection eventsand illumination detection events; and refining, with one or moreprocessors, the one or more identified features on the sample based onthe set of coincidence events.